SENSORS AND MICROSYSTEMS

SENSORS AND MICROSYSTEMS
Proceedings of the 9th Italian Conference

Ferrara, Italy, 8 - 11 February 2004

CONTENTS

FRONT MATTER	i
BIOSENSORS AND BIO-MEDICAL APPLICATIONS
ULTRASOUND SYSTEM FOR SIMULTANEOUS DETECTION OF BLOOD VELOCITY PROFILES AND WALL ELASTICITY IN HUMAN ARTERIES S. RICCI, T. MORGANTI, G. BAMBI, E. BONI, F. GUIDI and P. TORTOLI	3
ORIENTED AND REVERSIBLE IMMOBILISATION OF RECOMBINANT PROTEINS ON GOLD µ-ARRAY J. MALY, M. ILIE, V. FOGLIETTI, E. CIANCI, A. MINOTTI, B. LANZA, A. MASCI, W. VASTARELLA and R. PILLOTON	8
CONNECTING CAPILLARIES TO A MICROREACTOR STRUCTURED IN BOROFLOAT^® GLASS M. ILIE, V. FOGLIETTI, E. CIANCI, A. MINOTTI, E. VASILE, L. NARDI, J. MALY, R. PILLOTON and A. MASCI	14
SCREEN PRINTED ELECTRODES FOR BIOSENSOR APPLICATION: REPRODUCIBILITY, SENSITIVITY AND STABILITY WALTER VASTARELLA, B. LANZA, A. MASCI and R. PILLOTON	19
PROPERTIES OF GAS SENSITIVE ENZYME-METAL CONTACT A. GALDIKAS, A. ŠETKUS, A. MIRONAS, V. LAURINAVIČIUS, R. MEŠKYS, J. RAZUMIENĖ, S. KACIULIS, G. PADELETTI, L. PANDOLFI and M. VITICOLI	25
SPONTANEOUS DEPOSITION OF AMPHIPHILISED PORPHYRIN ORDERED FILM ON GLASS D. MONTI, M. VENANZI, R. PAOLESSE, C. DI NATALE, A. D’AMICO, M.G. MANERA and R. RELLA	30
COMPARISON BETWEEN TWO DIFFERENT POTENTIOMETRIC METHODS FOR HUMAN ANTI-IMMUNOGLOBULIN G AND HUMAN IMMUNOGLOBULIN G. L. CAMPANELLA, E. MARTINI and M. TOMASSETTI	37
DEVELOPMENT OF ARTIFICIAL OLIGOPEPTIDES AS BIOMIMETIC RECEPTORS FOR CARBAMATE AND ORGANOPHOSPHATE PESTICIDES USING A COMPUTATIONAL APPROACH M. MASCINI, M. DEL CARLO and D. COMPAGNONE	44
COMPARISON AMONG VOLTAMMETRIC, BIOSENSOR AND SPECTROPHOTOMETRIC METHODS, FOR THE DETERMINATION OF THE ANTIOXIDANT CAPACITY OF COBALT COMPLEXES PROPOSED AS ANTICANCER ACTIVE PRINCIPLES L. CAMPANELIA, D. BELLANTONI, A. BONANNI, G. FAVERO, I.YA. LEVITIN and M. TOMASSETTI	50
ELECTROCHEMICAL DEVICE FOR THE DETECTION OF GENOTOXIC COMPOUNDS IN FISH BILE SAMPLES GRAZIANA BAGNI, SILVIA RAQUEL HERNANDEZ, GIOVANNA MARRAZZA and MARCO MASCINI	56
MODIFIED SCREEN PRINTED ELECTRODES FOR GLUTATHIONE DETECTION F. ARDUINI, F. RICCI, G. PALLESCHI, D. MOSCONE and A. AMINE	61
FULLY ELECTRONIC DNA DETECTION TECHNIQUE CLAUDIO STAGNI DEGLIESPOSTI, CARLOTTA GUIDUCCI, LUCA BENINI, BRUNO RICCO’, GIAMPAOLO ZUCCHERI, BRUNO SAMORÌ and UBALDO MASTROMETTEO	67
STRUCTURING THE PHOTOSENSITIVE GLASS FOR MICROREACTORS M. ILIE, L. NARDI, V. FOGLIETTI, E. CIANCI, F. SCARINCI and A. MINOTTI	72
GAS SENSING
WO₃ HYDROCARBON SENSOR WITH FAST RESPONSE A. TRINCHI, S. J. IPPOLITO, S. KANDASAMY, W. WLODARSKI, K. KALANTAR-ZADEH, S. KACIULIS, L. PANDOLFI and S. VITICOLI	81
PREPARATION AND CHARACTERIZATION OF HYBRID PHORPHYRIN-TIN DIOXIDE CHEMICAL SENSORS A. FORLEO, M. EPIFANI, R. RELLA, P. SICILIANO, A.M. TAURINO, A. D’AMICO, C. DI NATALE, D. MONTI, S. NARDIS and R. PAOLESSE	86
p-TYPE CHEMORESISTIVE GAS SENSOR BASED ON Pt-MODIFIED NiO SPUTTERED THIN FILMS FOR THE DETECTION OF HYDROGEN ELECTRONIC NOSE S. CAPONE, P. SICILIANO, I. HOTOVY, V. REHACEK, J. HURAN and L. SPIESS	92
GAS SENSOR BASED ON A POROUS/CRYSTALLINE SILICON STRUCTURE G. BARILLARO, A. DILIGENTI, A. NANNINI and L. M. STRAMBINI	99
RECOVERY TIME IMPROVEMENT OF QMB SENSORS BY AN INTEGRATED SIMPLE MICRO HEATER E. ZAMPETTI, A. MACAGNANO, S. PANTALEI, C. DI NATALE, R. PAOLESSE and A. D’AMICO	105
MONITORING OF ENVIRONMENTAL ODOURS BY AN ELECTRONIC NOSE: WASTE WATER TREATMENT PLANT AND RUBBISH DUMP, THREE CASE STUDIES G. PENNAZZA, A. VALENTI, C. DI NATALE, R. PAOLESSE, A. MACAGNANO, E. MARTINELLI and A. D’AMICO	111
SILICON NANOWIRES FOR HYDROGEN DETECTION A. TIBUZZI, F. FICORELLA, G. SONCINI, A. D’AMICO and C. DI NATALE	118
FABRICATION AND CHARACTERIZATION OF THE APSFET, AN ADSORPTION POROUS SILICON FET G. BARILLARO, A. DILIGENTI, A. NANNINI and L. M. STRAMBINI	123
ELECTRONIC NOSE, HS-SPME/GC/MS AND PANEL TEST CORRELATION FOR MONO –CULTIVAR EXTRA-VIRGIN OLIVE OILS D. DELLO MONACO, C. DISTANTE, D.S. PRESICCE, P. SICILIANO, A.M. TAURINO, M. ZUPPA, A. CIMATO and G. SANI	128
OPTIMIZATION OF COMBUSTION CONTROL BY SENSORS BASED ON TiO₂ THIN FILM D.S. PRESICCE, L. FRANCIOSO, M. EPIFANI, R. RELLA, P. SICILIANO and A. FICARELLA	134
TOWARDS NO₂ POROUS SILICON GAS SENSOR: MONITORING CHARACTERISTIC OVER LONG TIME E. MASSERA, I. NASTI, L. QUERCIA, I. REA and G. DI FRANCIA	139
A MULTIDISCIPLINARY STUDY ON STONE MONUMENTS DAMAGE M.C. CAROTTA, E. FERRARI, S. GHERARDI, C. MALAGÙ, M. PIGA and C. VACCARO	145
A STUDY OF THE OSCILLATORY RESPONSE OF PLATINUM COILS TO CARBON MONOXIDE L. LI, W. WLODARSKI, A. TRINCHI and K. GALATSIS	151
NANOSCIENCE AND NEW MATERIALS
NANOSTRUCTURES REACTIVITY FOR GAS SENSOR APPLICATIONS G. DI FRANCIA, I. REA, P. MADDALENA and S. LETTIERI	159
MoO₃ NANORODS FOR GAS SENSING APPLICATIONS L. FRANCIOSO, A. FORLEO, P. SICILIANO, A. M. TAURINO, M. STALDER and R. NESPER	164
TIO₂ NANOPARTICLE THIN FILMS FOR SENSING APPLICATION BASED ON SURFACE PLASMON RESONANCE M.G. MANERA, R. RELLA, L. CURRI, D. COZZOLI, R. COMPARELLI, A. AGOSTIANO, G. LEO and L. VASANELLI	169
VAPOUR SENSING PROPERTIES OF CARBON NANOTUBES ONTO CADMIUM ARACHIDATE MULTILAYER INVESTIGATED BY ACOUSTIC SENSORS AND OPTICAL FIBRE BASED REFLECTOMETER SENSOR M. PENZA, G. CASSANO, P. AVERSA, F. ANTOLINI, M. GIORDANO, L. NICOLAIS, A. CUSANO and A. CUTOLO	175
MIXED OXIDES FOR GAS SENSING: THE ROLE OF THE ANNEALING PROCESSES A. VOMIERO, G. DELLA MEA, C. SCIAN, V. GUIDI, G. SCHIFFRER, G. MARTINELLI, E. COMINI, M. FERRONI and G. SBERVEGLIERI	183
A SEMI-CLASSICAL APPROACH FOR DETERMINATION OF THE INTER-GRANULAR ENERGY BARRIER HEIGHT IN VERY-FINE NANOGRAINS V. GUIDI, C. MALAGÙ, G. MARTINELLI, S. COZZOLINO and M. PADULA	188
SPECTROSCOPIC CHARACTERISATION OF DEFECTS ON Mo/W MIXED OXIDE S. MORANDI, G. GHIOTTI, A. CHIORINO and B. BONELLI	194
IMPROVEMENTS OF VOC’S SENSOR BASED ON POLYMER COMPOSITE THIN FILMS L. QUERCIA, F. LOFFREDO, E. MASSERA and G. DI FRANCIA	200
PHYSICAL SENSORS
PIEZORESISTIVE EFFECTS IN THICK FILM RESISTORS: 30 YEARS AFTER MARIA PRUDENZIATI	207
AUTOMATIC CAPACITANCE COMPENSATION (ACC) OSCILLATOR FOR TSM QUARTZ SENSORS UNDER ACOUSTIC AND DIELECTRIC LOADING M. FERRARI, V. FERRARI, D. MARIOLI and A. TARONI	217
ALUMINUM NITRIDE THIN FILMS FOR A MICROMECHANICAL ULTRASONIC LIQUID NEBULIZER N. YASENOV, L. FREY, H. RYSSEL and G. SONCINI	222
STRESS-STRAIN BEHAVIOUR OF ELECTROPLATED GOLD THIN FILMS A. BAGOLINI, B. MARGESIN and F. GIACOMOZZI	227
DEVELOPMENT AND CHARACTERIZATION OF A SILICON-BASED THREE AXIAL FORCE SENSOR F. VALVO, P. VALDASTRI, S. ROCCELLA, L. BECCAI, A. MENCIASSI, M.C. CARROZZA and P. DARIO	231
HEATED CHANNEL MASS FLOW SENSOR LEONARDO FALLERINI, LORENZO CAPINERI, LEONARDO MASOTTI, PIERO SICILIANO, MAURIZIO DE LUCIA and CHRISTIAN PAOLO MENGONI	236
RESONANT ACCELEROMETER IN MICROMACHINED SILICON G. FAGNANI, V. FERRARI, A. GHISLA, D. MARIOLI and A. TARONI	241
ACOUSTIC GUIDED WAVES INTERDIGITAL TRANSDUCERS FOR NON DESTRUCTIVE TESTING OF CARBON-EPOXY COMPOSITES FOR SPACECRAFT STRUCTURES F. BELLAN, A. BULLETTI, L. CAPINERI, L. MASOTTI, F. GUASTI and E. ROSI	246
INTEGRATED CONSTANT TEMPERATURE ANEMOMETER FOR LIQUID FLOW RATE MEASUREMENT P. BRUSCHI, D. NAVARRINI and M. PIOTTO	251
AN ELECTRICAL MODEL FOR SIMULATING THE DYNAMICS OF A CANTILEVER BEAM PAOLO BISEGNA, GIOVANNI CARUSO, FRANCO MACERI, FABIO LO CASTRO and ARNALDO D’AMICO	257
DESIGN AND CHARACTERIZATION OF A FAMILY OF FLUXGATE MAGNETIC SENSORS IN PCB TECHNOLOGY A. BASCHIROTTO, E. DALLAGO, P. MALCOVATI, M. MARCHESI and G. VENCHI	262
FLUID DYNAMICS SENSOR ARRAYS IN PRINTED CIRCUIT BOARD TECHNOLOGY FOR AEROSPACE APPLICATIONS M. ZAGNONI, A. GOLFARELLI, P. PROLI, S. CALLEGARI, A. TALAMELLI, E. SANGIORGI and M. TARTAGNI	267
OPTICAL SENSORS
OPTOELECTRONIC SENSORS FOR AN INTEGRATED APPROACH TO ENVIRONMENTAL MONITORING G.C. RIGHINI, G. CECCHI, G. NUNZI CONTI and G. GIUSFREDI	275
INTEGRATED MICROFLUIDIC OPTICAL SENSOR R. BERNINI, S. CAMPOPIANO, L. ZENI and P. M. SARRO	281
SPECTRAL NEPHELOMETRY FOR THE GEOGRAPHIC CLASSIFICATION OF ITALIAN EXTRAVIRGIN OLIVE OILS A.G. MIGNANI, L. CIACCHERI, A. CIMATO, G. SANI and P.R. SMITH	286
CO₂ SENSOR SYSTEM INCLUDING A MICROHEATER AND A THERMOPILE A. CATINI, A. PASQUINI, F. LO CASTRO, A. D’AMICO, C. DI NATALE, C. CORSI, A. TIBUZZI, M. DECARLI, G. SONCINI and V. GUARNIERI	292
A NEW APPROACH TO UV IMAGING BY CVD-DIAMOND DEVICES G. MAZZEO, S. SALVATORI and G. CONTE	297
AN OPTICAL SENSOR FOR MONITORING HEAVY METAL IONS IN WATER F. REGAN, D. LEAMY, A.G. MIGNANI, A.A. MENCAGLIA and L. CIACCHERI	303
ONLINE WATER COLOR MONITORING BY MEANS OF FIBER OPTIC TECHNOLOGY IN A WATER RECYCLING PLANT A.G. MIGNANI, A.A. MENCAGLIA, L. CIACCHERI and R. CAMISA	309
ACCURACY ENHANCEMENT IN BRILLOUIN DISTRIBUTED FIBER-OPTIC TEMPERATURE SENSORS USING SIGNAL DECONVOLUTION R. BERNINI, A. MINARDO and L. ZENI	314
NOVEL OPTOELECTRONIC SENSING DEVICE BASED ON SYNDIOTACTIC POLYSTYRENE AS SENSITIVE LAYER M. GIORDANO, M. RUSSO, A. CUSANO, G. MENSITIERI and G. GUERRA	319
OPTOELECTRONIC REFRACTIVE INDEX MEASUREMENTS BY FIBER BRAGG GRATING SENSORS A. IADICICCO, A. CUSANO, A. CUTOLO and M. GIORDANO	324
REINFORCING AND MONITORING OF CONCRETE STRUCTURES WITH COMPOSITES AND FIBER OPTIC SENSORS R. FALCIAI, J. M. KENNY, A. TERENZI, C. TRONO and R. MEZZACASA	329
MICROMACHINING
MICROFLUIDIC DEVICE FOR REAL TIME PCR DETECTION G. BARLOCCHI, U. MASTROMATTEO, S. SASSOLINI, M. SCURATI and F. VILLA	339
MICROMACHINED DIFFERENTIAL TEMPERATURE GAS FLOW SENSOR WITH ON-CHIP READOUT ELECTRONICS P. BRUSCHI, D. NAVARRINI and M. PIOTTO	345
MICROWAVE MEMS SWITCHES IN SERIES CONFIGURATION: TECHNOLOGY AND CIRCUITAL MODELING R. MARCELLI, F. GIACOMOZZI, B. MARGESIN, G. BARTOLUCCI and G. MINUCCI	351
SELECTIVE MONITORING OF INDOOR VOC AT PPB LEVEL S. ZAMPOLLI, I. ELMI, S. NICOLETTI, L. DORI, G. C. CARDINALI and J. STÜRMANN	356
DESIGN AND SIMULATION OF GRADIENT MICROHEATERS FOR GAS SENSOR ARRAYS A. ADAMI, A. BENVENUTO, L. LORENZELLI, M. ZEN, L. FRANCIOSO and P. SICILIANO	364
A MICROMACHINED GLASS CHIP FOR CAPILLARY ELECTROPHORESIS A. NANNINI, F. PIERI, L. M. STRAMBINI and M. PIOTTO	369
AN OPTIMIZED FRONT-SIDE MICROMACHINING PROCESS FOR DIELECTRIC MEMBRANES USING TMAH F. MANCARELLA, A. RONCAGLIA, G.C. CARDINALI, F. TAMARRI and M. PASSINI	374
ON ELECTROMECHANICAL PERFORMANCE OF LOW ACTUATION VOLTAGE RF MEMS SWITCHES K. J RANGRA, L. LORENZELLI, C. COLLINI, B. MARGESIN, F. GIACOMOZZI and G. SONCINI	379
NODAL MODELLING OF UNEVEN ELECTROSTATIC TRANSDUCTION IN MEMS J. IANNACCI and R. GADDI	385
APPLICATIONS AND NEW TECHNOLOGY
LOW VOLTAGE LOW POWER OSCILLATOR FOR ARRAYS OF QUARTZ MICROBALANCES C. FALCONI, E. ZAMPETTI, A. MASSARI, E. MARTINELLI, C. DI NATALE and A. D’AMICO	393
DEVELOPMENT OF A TEMPERATURE-INDEPENDENT APPARATUS FOR GENERATING CALIBRATED GAS FLOW WITH PERMEATION TUBES S. IPSALE, N. DONATO, G. NERI, A. BONAVITA, G. RIZZO and S. GALVAGNO	401
CEREAL GRAIN SORTING BY IMPEDANCE SPECTROSCOPY SENSING M. ZAGNONI, A. GOLFARELLI, P. PROLI, E. SANGIORGI and M. TARTAGNI	406
AUTOMATIC ORDER REDUCTION FOR FINITE ELEMENT MODELS ANDREAS GREINER, JAN LIENEMANN, EVGENII RUDNYI, JAN G. KORVINK, LORENZA FERRARIO and MARIO ZEN	411
MODELING OF A CONDENSER MICROPHONE WITH STRUCTURED POLYSILICON DIAPHRAGM A. FAES, F. GIACOMOZZI, B. MARGESIN and M. ZEN	418
CURRENT MODE-BASED INTEGRATED GAS SENSOR INTERFACES GIUSEPPE FERRI, NICOLA GUERRINI, STEFANO DEL RE and FABRIZIO MANCINI	424
APPLICATION OF THE SMART-RAS SYSTEM FOR MONITORING THE GROWTH OF ORGANIC COMPOUNDS IN ULTRA-HIGH-VACUUM G. L. BUSSETTI, C. GOLETTI, P. CHIARADIA, M. MARINI, A. PEDE and E. MAZZONE	430
A WINDOWS BASED REAL-TIME SYSTEM FOR THE ANALYSIS OF ELECTROPHYSIOLOGICAL SIGNALS FROM NEURONAL NETWORK COUPLED TO MICRO TRANSDUCER ARRAYS A. NOVELLINO, D. PANTILE, S. MARTINOIA and G. VERRESCHI	436
ADVANCED SAW TRANSDUCERS FOR MULTISENSING SYSTEMS APPLIED TO LOW CONCENTRATION OF VOLATILE COMPOUNDS M. BENETTI, D. CANNATÀ, F. DI PIETRANTONIO, E. VERONA and A. D’AMICO	442
AUTOMATIC SYSTEM FOR WORK FUNCTION MEASUREMENT EMPLOYING ΣΔ MODULATION C. FALCONI, F. LO CASTRO, L. FUSARO, M. SCOCCIA, C. DI NATALE and A. D’AMICO	448
HIGH ACCURACY INTERFACE FOR SENSOR BRIDGES C. FALCONI, A. D’AMICO, E. MARTINELLI, G. SAGGIO and C. DI NATALE	456
OP AMP TUNING FOR HIGH PERFORMANCE ANALOG CIRCUITS CHRISTIAN FALCONI, GIULIANO GUARINO and ARNALDO D’AMICO	461
PRELIMINARY MEASUREMENTS OF CHARGE COLLECTION OF P+/N JUNCTION SIC DETECTORS AND SIMULATIONS OF SCHOTTKY DIODES F. MOSCATELLI, A. SCORZONI, A. POGGI, R. NIPOTI, A. DIPLACIDO, S. LAGOMARSINO, M. BRUZZI and STEFANO MERSI	468
ANALYSIS AND SIMULATION OF SILICON THIN DETECTORS M. PETASECCA, F. MOSCATELLI, G.U. PIGNATEL and A. SCORZONI	473
HEAVY METALS MONITORING IN THE MASSIF CENTRAL BY USING A PORTABLE SCREEN-PRINTED SENSOR S. LASCHI, N. GUIGUES, I. PALCHETTI and M. MASCINI	478
A HUMAN-LIKE CHEWING MEASUREMENT SYSTEM FOR THE ASSESSMENT OF THE PERCEPTION OF FOOD CONSISTENCE GIOVANNI PIOGGIA, ANDREA MARCHETTI, MARCELLO FERRO, PIERO BARILI, DANILO DE ROSSI, FABIO DI FRANCESCO and LUIGI GEROVASI	484
COMPENSATION ANALOG AND DIGITAL FILTERING FOR PYROELECTRIC SENSORS ARRAYS G. GROSSO, L. CAPINERI, L. MASOTTI, M. MAZZONI, F. LENZI and S. CAIOLI	489
Back