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SENSORS AND MICROSYSTEMS Proceedings of the 7th Italian Conference Bologna, Italy, 4 - 6 February 2002 CONTENTS FRONT MATTER i PLENARY TALKS OPTICAL BIOCHIP TECHNOLOGY C. PREININGER and U. SAUER 3 INTERFACE CIRCUITS FOR INTEGRATED MICROSENSORS PIERO MALCOVATI 8 NEXUS & EURIMUS: TWO MAJOR INITIATIVES TO SUPPORT R&D AND STRENGTHEN EUROPEAN MEMS INDUSTRY GAËTAN MENOZZI 13 ACTUATORS CHARACTERIZATION OF DIELECTRIC ELASTOMER PLANAR ACTUATORS F. CARPI, A. MAZZOLDI, D. DE ROSSI and P. CHIARELLI 33 MICROMACHINED STRUCTURES: DESIGN, TECHNOLOGY AND CHARACTERIZATION A NEW PROCESS FOR GATED SILICON FIELD EMITTER ARRAYS FABRICATION G. BARILLARO, D. NAVARRINI and G. PENNELLI 43 FABRICATION OF MILLIMETER WAVE DEVICES ON DIELECTRIC MEMBRANES BY MICROMACHINING TECHNOLOGY F. GIACOMOZZI, B. MARGESIN, M. ZEN, R. MARCELLI and A. MÜLLER 49 DEEP WET ETCHING OF BOROSILICATE GLASS FOR MICROFLUIDIC DEVICES M. ILIE, V. FOGLIETTII and E. CIANCI 55 ACCURATE ANALYTICAL THERMAL MODEL OF THE HEATING ELEMENT IN MICROMACHINED GAS SENSORS M. BARONCINI, P. PLACIDI, A. SCORZONI and G. C. CARDINALI 60 MICROMACHINED MICROHEATER FOR THE GENERATION OF A TEMPERATURE GRADIENT A. TIBUZZI, G. SONCINI, M. ZEN, V. GUARNIERI, B. MARGESIN and A. D'AMICO 65 MEASUREMENTS OF THE MECHANICAL PROPERTIES OF COMPOSITE MEMBRANES BY LOAD-DEFLECTION METHOD WITH A PROFILOMETER A. FAES, F. GIACOMOZZI, V. GUARNIERI and B. MARGESIN 70 HIGH FREQUENCY KELVIN PROBE INSTRUMENTATION D. D'Amico, M. Scarselli, V. Foglietti, P. Chiaradia, P. Lugli and C. Di Natale 75 MICROSYSTEMS MICROELECTRONIC ULTRASENSITIVE DETECTORS FOR CHIP ELECTROPHORESIS MICROSYSTEMS I. RECH, S. COVA, F. ZAPPA, M. GHIONI, M. CHIARI and M. CRETICH 83 ON-LINE MEASUREMENTS OF CELL POPULATION METABOLISM BY ISFET ARRAY-BASED MICROSYSTEMS L. LORENZELLI, B. MARGESIN, M. ZEN, S. MARTINOIA, N. ROSSO and M. T. TEDESCO 90 NEW ARCHITECTURE IN DESIGNING MICROSYSTEMS Ubaldo Mastromatteo and Bruno Murari 94 A SYSTEM-ON-CHIP FOR PRESSURE-SENSITIVE FABRICS M. SERGIO, N. MANARESI, M. TARTAGNI, R. GUERRIERI and R. CANEGALLO 99 ELECTRONIC NOSES AND MULTISENSOR ARRAYS INDEPENDENT COMPONENT ANALYSIS OF ELECTRONIC NOSE DATA Eugenio Martinelli, Arnaldo D'Amico and Corrado Di Natale 107 SPECTRAL NEPHELOMETRY FOR THE MEASUREMENT OF EXTRA-VIRGIN OLIVE OIL FINGERPRINTS A. G. MIGNANI, L. CIACCHERI, P. R. SMITH, A. CIMATO and G SANI 112 ANALYSIS OF DRY SALAMI BY MEANS OF AN ELECTRONIC NOSE AND CORRELATION WITH MICROBIOLOGICAL AND ANALYTICAL METHODS D. DELLO MONACO, A. TAURINO, S. CAPONE, R. RELLA, S. SICILIANO, L. FERRARA, G. MAGLIONE, A. BASSO and D. BALZARANO 119 ANALYSIS OF PEACHES RIPENESS BY AN ELECTRONIC NOSE AND NEAR-INFRARED SPECTROSCOPY S. CAPONE, C. DISTANTE, M. EPIFANI, R. RELLA, P. SICILIANO and A. TAURINO 125 MULTISENSOR ARRAY AND PATTERN RECOGNITION TECHNIQUES FOR CHARACTERIZATION OF DIFFERENT MATE BRANDS D. RODRIGUEZ, A. BOSELLI, A. LAMAGNA, I. ELMI, S. ZAMPOLLI, S. REICH, L. MURRUNI, C. ARRIETA, R. MARABINI and J. GIMÉNEZ 131 CHEMICAL SENSORS BASED ON INORGANIC/ORGANIC MATERIALS TPD INVESTIGATION OF Au-DOPED IRON OXIDE FILM FOR CO GAS SENSORS G. NERI, A. BONA VITA, G. RIZZO, S. GALVAGNO and L. S. CAPUTI 139 INFLUENCE OF TECHNOLOGY ON THE TRANSIENT RESPONSE IN METAL OXIDE THIN FILM GAS SENSORS S. KACIULIS, L. PANDOLFI, A. GALDIKAS, D. SENULIENE and A. SETKUS 144 INVESTIGATION OF THE OXYGEN GAS SENSING PROPERTIES OF Fe203 THIN FILMS WITH DIFFERENT DOPANTS G. NERI, A. BONAVITA, S. GALVAGNO, Y. X. LI, A. TRINCHI, K. GALATSIS and W. WLODARSKI 149 PREPARATION AND CHARACTERIZATION OF THICK FILMS OF Au-, Pd-, Pt-DOPED SnO2 FOR GAS SENSING B. CAVICCHI, M. C. CAROTTA, M. FERRONI, G. MARTINELLI, M. PIGA and S. GHERARDI 154 SnO2 THIN FILM CHEMICAL SENSOR AS DETECTOR FOR CAPILLARY GAS-CHROMATOGRAPHY OF ORGANIC VOLATILE COMPOUNDS A. STRINI, E. MAPELLI and I. ELMI 158 THIN FILMS OF ALUMINUM/VANADIUM OXIDE FOR ORGANIC VAPOURS SENSING C. BARATTO, G. SBERVEGLIERI, G. P. BERNHARDT, R. J. LAD and J. F. VETELINO 163 SOL-GEL MoO3-WO3 THIN FILMS FOR ETHANOL VAPOR SENSING K. GALATSIS, Y. X. LI, W. WLODARSKI, K. KALANTAR-ZADEH, E. COMINI and G. SBERVEGLIERI 168 Zn AND Ce DOPED Ga2O3 THIN FILMS FOR OXYGEN GAS SENSING A. TRINCHI, Y. X. LI, W. WLODARSKI and K. GALATSIS 173 SPIN COATED W/TIO2 THIN FILMS AS SELECTIVE ETHANOL SENSORS C. GARZELLA, G. SBERVEGLIERI, E. BONTEMPI, L. E. DEPERO, A. VOMIERO, G. DELLA MEA and G. DI FRANCIA 180 SENSING MEMBRANES BASED ON POLY(MONOSUBSITUTED ACETYLENES) FOR DETECTION OF ALCOHOLS L. PALUMMO, A. BEARZOTTI, I. FRATODDI, R. D'AMATO and M. V. RUSSO 185 A QUANTUM MECHANICAL STUDY OF THE STABILITY OF SN02 NANOCRYSTALLINE GRAINS A. M. MAZZONE 192 SENSITIVITY AND SELECTIVITY ENHANCEMENT IN WO3 AND CR2-xTIxO3 THIN FILMS DEPOSITED BY PULSED LASER ABLATION F. AHMED, S. NICOLETTI, S. ZAMPOLLI, I. ELMI, A. PARISINI, L. DORI, A. MEZZI and S. KACIULIS 197 PHYSICAL AND GAS SENSING PROPERTIES OF Mo03-W03 NANOSTRUCTURED OXIDES A. TAURINO, M. CATALANO, R. RELLA, P. SICILIANO, K. GALATSIS, Y. X. LI, W. WLODARSKI, E. COMINI and G. SBERVEGLIERI 205 BIOSENSORS/BIOMEDICAL APPLICATIONS TOWARDS ULTRASONIC VIRTUAL BIOPSY E. BIAGI, L. MASOTTI, A. ACQUAFRESCA and D. MENICHELLI 211 ENZYMATIC PROBES ABLE TO WORK IN ORGANIC SOLVENT FOR THE DETERMINATION OF WATER CONTENT IN HYDROPHOBIC MATRIXES L. Campanella, G. De Santis, G. Favero, M. P. Sammartino and M. Tomassetti 218 PROGRESSES IN MINIATURIZING ANALYTICAL SYSTEMS G. DE BELLIS, G. CARAMENTI, M. ILIE, E. CIANCI and V. FOGLIETTI 225 A MICROELECTRONIC APPROACH FOR SINGLE CELL MANIPULATION M. TARTAGNI, A. ROMANI, L. ALTOMARE, A. LEONARDI, R. GUERRIERI, G. MEDORO and N. MANARESI 230 OXIDIZED CARBON POWDER FOR ENZYME IMMOBILIZATION ON SCREEN PRINTED BIOSENSORS SUNA TTMUR, AZMI TELEFONCU, AMEDEO MASCI and ROBERTO PILLOTON 234 A NON-EXTRACTIVE SPR-BASED BIOSENSOR ASSAY FOR IGF-1 IN BOVINE SERUM A. GUIDI, G. IANNONE, L. CASTIGLIEGO and D. GIANFALDONI 239 INDICATOR-FREE ELECTROCHEMICAL DNA BIOSENSOR FOR THE DETECTION OF HYBRIDISATION REACTION F. LUCARELLI, G. MARRAZZA, I. PALCHETTI and M. MASCINI 244 SILICON-BASED THREE AXIAL FORCE SENSOR FOR PROSTHETIC APPLICATIONS L. BECCAI, S. ROCCELLA, A. ARENA, A. MENCIASSI, M. C. CARROZZA and P. DARIO 250 FABRICATION OF AMPEROMETRIC SENSOR - BASED MICROSYSTEMS FOR BIOMEDICAL APPLICATIONS A. BENVENUTO, A. MENCIASSI, P. DARIO, L. LORENZELLI and B. MARGESIN 256 DIAMOND-BASED NANO-COMPOSITES AND CARBON NANOSTRUCTURES ELECTRODES AS NEW ELECTROCHEMICAL PROBES F. Valentini, A. Lupu, S. Orlanducci, D. Compagnone, C. Cremisini, M. L. Terranova and G. Palleschi 262 POTENTIOMETRIC MICROSENSORS FOR CYANOBACTERIAL BIOFDLMS MONITORING IN HYPOGEAN MONUMENTS J. CALVO QUINT ANA, S. PERMARINI, P. ALBERTANO, G. PALLESCHI and D. MOSCONE 270 IMMUNOLOGICAL CHARACTERIZATION OF ANTI-FACTOR VIII ANTIBODIES BY A SANDWICH- ELISA AND THE BIA-TECHNOLOGY G. IANNONE, P. G. DAVOLI, A. TRALDI, C. D'URSO, S. ARRIGHI and R. P. REVOLTELLA 275 LOW TEMPERATURE BONDING OF GLASS ON SILICON COMPOUNDS FOR BIOMEDICAL APPLICATIONS M. ILIE, V. FOGLIETTI, A. MINOTTI, E. CIANCI, A. NOTARGIACOMO and B. MARCULESCU 283 OPTICAL, I.R. AND RADIATION SENSORS RUTHENIUM-BASED OPTICAL FIBER SENSOR FOR GASEOUS OXYGEN DETECTION G. DI MARCO, M. LANZA, G. CALOGERO, P. BIZZARRI and A. G. MIGNANI 291 FIBER BRAGG GRATING SENSORS FOR PAINTED WOOD PANELS MONITORING R. FALCIAI, C. TRONO, G. LANTERNA and C. CASTELLI 298 TEMPERATURE EFFECTS ON FBG SENSORS RICCARDO FALCIAI and COSIMO TRONO 303 A STAND-ALONE INSTRUMENT FOR PYROELECTRIC SENSORS ARRAYS WITH DIFFERENT NUMBER OF ELEMENTS AND APPLICATIONS L. CAPINERI, A. CASINI, F. LENZI, L. MASOTTI, M. MAZZONI, D. BIGAZZI, F. ERMINI, C. GIOVANNUCCI and V. RUSSO 309 A HIGH RESPONSIVITY PVDF PYROELECTRIC SENSOR AND PERSPECTIVES FOR A FERROELECTRIC ELECTROPTIC MODULATOR IN A REMOTE TEMPERATURE MEASUREMENT SYSTEM L. CAPINERI, F. CUSANNO, L. MASOTTI, G. TOCI, M. MAZZONI and J. KOBAYASHI 314 THEORY AND DESIGN OF AN INTEGRATED OPTICAL SENSOR BASED ON A MACH-ZEHNDER INTERFEROMETER G. G. Bentini, M. Bianconi, M. Chiarini, G. Correra, P. Maccagnani, F. Tamarri and R. Guzzi 319 RADIATION ACTIVE PIXEL SENSOR INTEGRATED IN 0.25 μm CMOS TECHNOLOGY: A PERSPECTIVE ANALYSIS D. PASSERI, P. PLACIDI, L. VERDUCCI, F. MOSCATELLI, A. SCORZONI, P. CIAMPOLINI, G. MATRELLA and G. M. BILEI 326 THE OPTICAL TRANSDUCTION OF THE SENSITIVE PROPERTIES OF METALLOPORPHYRINS FILMS Patrizia Bizzarri, Antonella Macagnano, Roberto Paolesse, Sara Nardis, Arnaldo D'Amico, Andrea Mencaglia, Anna Grazia Mignani and Corrado Di Natale 331 HUMIDITY SENSORS A STUDY OVER GOLD PROMOTED Li-Fe2O3 BASED CERAMIC MATERIALS FOR HUMIDITY SENSORS G. NERI, A. BONAVITA and S. GALVAGNO 339 HUMIDITY SENSORS BASED ON POLYMER ELECTROLYTES: CONSTRUCTION OF AN IMPEDANCE DEVICE M. J. YANG, Y. LI, N. CAMAIONI, A. MARTELLI, G. RIDOLFI and G. CASALBORE-MICELI 344 POTENTIOMETRIC SENSORS A NEW LAYOUT FOR SCREEN-PRINTED ELECTRODES: FRONT/BACK GEOMETRY LIVIA DELLA SETA, AMEDEO MASCI and ROBERTO PILLOTON 353 DISPOSABLE SCREEN PRINTED POTENTIOMETRIC SENSORS FOR DETERMINATION OF FREE RADICALS L. CAMPANELLA, G. FAVERO, S. MARINO, R. PILLOTON and M. TOMASSETTI 358 ELECTRONIC CIRCUIT DESIGN FOR SENSORS AND MICROSYSTEMS MICROCONTROLLER-BASED INTERFACE CIRCUIT FOR METAL-OXIDE GAS SENSORS M. BRUGIA, M. BARONCINI, P. PLACIDI, L. VERDUCCI, A. SCORZONI, G. C. CARDINALI and I. ELMI 365 ISFET SENSOR INTEGRATED WITH A CMOS CURRENT SINK FOR SIGNAL CONDITIONING L. LORENZELLI, S. MARTINOIA, M. CORRÀ and G. SONCINI 370 DRIVER DESIGN OPTIMIZATION IN INKJET PRINTING TECHNOLOGY A. RONCAGLIA, N. SPECIALE, G. C. CARDINALI, S. SOLMI, P. BELLINI and A. MENEGATTI 374 ACCURACY AND RANGE LIMITATIONS IN OSCILLATOR-DRIVEN QCM SENSORS V. FERRARI, D. MARIOLI and A. TARONI 382 LIQUID FLOW DETECTION USING AN INTEGRATED ANEMOMETER BASED ON A SINGLE TEMPERATURE SENSOR P. BRUSCHI, D. NAVARRINI and G. PENNELLI 388 MAGNETIC FIELD SENSORS INTEGRATED MAGNETIC FIELD SENSORS FABRICATED WITH A STANDARD CMOS PROCESS P. BRUSCHI, D. NAVARRINI, M. PIOTTO and L. DI PIRO 397 Back

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